Dry pump
- Screw type dry pump
Screw type dry pump
DRY VACUUM PUMP(SES120,SES180,SES330,SES500.SES700) Detail
- - Displacement speed(60Hz) : 125~665㎥/hr
- - Ultimate Pressure : 6.75×10⁻¹
The Screw Dry Vacuum pump SES Series(SES120,SES180,SES330,SES500.SES700) is Single Stage of Screw type
Vacuum pumping system.
We design the screw that is consider to optimum gas flowing. It divides five portion at cooling part.
It can be control respective refrigeration part as occasion demands. It strengthened the efficiency of the gear.
It combined with Mechanical booster pump according to exhausted volume suitably.
- 1. Applicating of of one Stage exhaustion efficiently.
2. No fluctuating rotary direction for one body of Screw and shaft
3. Divides five portion at cooling part. As occasion demands, can be control respective refrigeration part.
4. Can be adopt various Motor.
5. Using Resistance corrosion material of frequent gas touching exhausted part.
6. Reduce noise and vibration.
7. Can be operate at a high temperature process
8. Control Adjustable temperature
Application
Semi conductor Equipment
LCD Equipment
PVD & Evaporation & Heat Treatment process
CVD & Etching
ETC
