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Dry pump

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  • Screw type dry pump
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Screw type dry pump

DRY PUMP(SES300,600,1200,SES700B/4130) Detail

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  • - Displacement speed(60Hz) : 254~4,1305㎥/hr
  • - Ultimate Pressure : 6.75×10⁻¹

  • The Screw Dry Vacuum pump SES Series(SES300,SES600,SES1200,SES700B/4130) is Single Stage of Screw type
    Vacuum pumping system.
    We design the screw that is consider to optimum gas flowing. It divides five portion at cooling part.
    It can be control respective refrigeration part as occasion demands. It strengthened the efficiency of the gear.
    It combined with Mechanical booster pump according to exhausted volume suitably.
  • 1. Applicating of of one Stage exhaustion efficiently.
    2. No fluctuating rotary direction for one body of Screw and shaft
    3. Divides five portion at cooling part. As occasion demands, can be control respective refrigeration part.
    4. Can be adopt various Motor.
    5. Using Resistance corrosion material of frequent gas touching exhausted part.
    6. Reduce noise and vibration.
    7. Can be operate at a high temperature process 
    8. Control Adjustable temperature

    Application
    Semi conductor Equipment
    LCD Equipment
    PVD & Evaporation & Heat Treatment process
    CVD & Etching
    ETC


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